Making the most of ALD equipment with reliable maintenance

Introducing new Beneq TFS lifecycle services

Buying equipment is only the first step on the ALD journey. What matters as much as the equipment is what comes after the initial purchase. With reliable, quality maintenance, your ALD equipment life cycle can be extended and you will get the most out of your investment with reduced downtime. Below are some frequently asked questions and answers about our maintenance services.

If you want to know more about our new and improved lifecycle services, you can also join our upcoming webinar about Beneq Lifecycle Services for Thin Film Solutions on September 26th.

What kind of maintenance services does Beneq offer?

We offer both maintenance contracts and on-demand services for our customers. For contract you can choose between two contract models: Extended Life Cycle Services and Premium Life Cycle Services. One of the biggest benefits of having a maintenance contract compared to only using on-demand services is the preventative maintenance (PM), which also includes parts and travel costs. This makes budgeting easy and transparent. The annual PM visit is always performed according to a mutually agreed schedule. With preventive maintenance you also get an exhaustive service report which serves as a certificate of performance level for your Beneq ALD reactor.

We believe that maintenance shouldn’t be just about fixing issues when they arise but actually preventing them from occurring in the first place. Preventative maintenance results in reduced downtime and thus increased jobsite productivity. And of course, with the Premium contract, you also get coverage for unexpected events on top of the preventative maintenance.

What is the difference between the Premium and the Extended maintenance contract?

The biggest difference is that the Extended Life Cycle Services contract only includes the preventative maintenance (including labor, parts, and travel expenses). If unscheduled maintenance is needed, it will be charged according to our standard field service price list.

The Premium Life Cycle Services contract on the other hand includes basically everything: preventative maintenance and unscheduled repair (including labor, parts, and travel expenses). This means a total peace of mind as the contract also covers the unexpected. Furthermore, the Premium model includes a Beneq remote connection, which is an essential feature for fast problem solving and minimizing downtime. It is important to notice that Software upgrades for both PLC and HMI can be done through the remote connection.

Who will perform the maintenance on-site?

Our TFS Customer Services Team consists of highly skilled, professional ALD Field Service Engineers who are all thoroughly trained on Beneq ALD tools. We operate globally and have Field Service Engineers located in Europe, China, and the United States.

Can the maintenance be done remotely?

The Premium Life Cycle Services contract includes remote connection, which is installed by a Beneq Field Service Engineer on-site. The Remote Connection Service includes tool support and troubleshooting up to 20 hours per year. The technology uses eWON connection, which is started inside the customer’s network. No open ports from the internet to the customer's network are needed for a firewall.

What if I don’t want a maintenance contract for my equipment?

We have on-demand services available for customers who do not wish to commit to a contract. We will schedule on-demand maintenance visits on case-by-case basis. The charges will be according the Beneq TFS standard field service price list plus parts and traveling costs.

Questions were answered by Beneq’s Head of Customer Services Timo Rantasalmi.

For more information, please visit the Beneq TFS Lifecycle Services webpages.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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