The future of moisture protection is here

Seal surfaces with ALD

Atomic layer deposition (ALD) takes moisture protection to a completely new level by providing pin-hole free coating on even the most complex high ratio surfaces.

ALD provides hermetic sealing similar to a metal casing

One of the greatest challenges for power, RF, MEMS, LED and OLED microdisplays is the degradation of performance due to moisture ingress. ALD can help prevent moisture ingress by creating a hermetic sealing similar to a metal casing. ALD is extremely conformal and perfect even for coating high aspect ratio surfaces.

ALD film properties example: 50nm AI203 on Si

Moisture barrier test results presented at CSTIC 2018, Shanghai

Beneq has carried out moisture barrier tests with water vapor transmission rate (WVTR) measurements. The moisture barrier test results will be one of the topics in Mr Sami Sneck's presentation at the China Semiconductor Technology International Conference (CSTIC) 2018 in Shanghai.

Mr Sneck will also be talking about wafer scale encapsulation with Beneq C2 and much more. if you missed Sami’s presentation titled ALD Moisture Barrier for Wafer Level and Die Level Encapsulation, you can download it by clicking the image below.

Mr Sami Sneck will be talking about ALD Moisture
Barrier for Wafer Level and Die Level Encapsulation
at CSTIC on Monday, March 12

Drop by our Semicon China stand #2384!

We’ll also be at SEMICON China 2018 on March 14-16, Hall N2, booth #2384 at the Shanghai New International Expo Center. You can book a meeting with us, just fill in the form here.

Learn more

Learn more about ALD technology

Check out our  Beneq C2

... and our Beneq TFS 200!

Read more about ALD for HAR structures


Contact Lumineq

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Proceed to download

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Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.