Atomic layer depostion is the ideal solution for many optical coating challenges.

Optical coatings

Optical coatings is a major application area for atomic layer deposition. Film uniformality, conformality and repeatability with the possibility of coating complex surfaces make ALD technology ideal for optical applications.

The are several reasons for using ALD in optical and photonics applications and optoelectronics. Firstly, ALD enables coating objects that are difficult or impossible to coat by other methods. Secondly, ALD gives you free hands to engineer novel optical materials. Thirdly, the accuracy of the film thickness in ALD is usually 0.2 to 12 Å, depending on the material.

With the right choice of materials, good optical stack design and precise control of layer thickness, it is possible to build ALD coatings that alter the behavior of light in the desired wavelength range, be it IR, UV or visible light.

Thin film coatings can be used to improve the optical characteristics of objects and components in a multitude of areas, from LED illumination and micropore optics to lenses, wire-grid polarizers and diffractive optics. The examples of ALD applications in optics range from anti-reflective coatings for objects of any shape and lenses in laser optics to many kinds of reflective coatings and filters.

Beneq’s range of ALD equipment coupled with our long experience offers many possible applications of thin film coatings on various optical elements. ALD technology allows for precise control of film thickness which makes it optimal to use in optical coatings where films are required to be thicker.


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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