Beneq ALD coatings offer ultimate protection against corrosion

Anti-corrosion coatings

Sensitive components and materials require protection against corrosion to last long. Beneq ALD barriers provide protection for electronics components, PCBs, LEDs and equipment parts against corrosion.

Protective barrier coatings against corrosion for sensitive electronics components, such as sensor devices, require thin high-quality films around complex shapes. This makes creation of conformal coatings impossible for most thin-film coating processes. The surfaces can also be so multifaceted and porous that creating a conformal coating is impossible with most technologies. When tolerances are tight, making sure the protective layer is even and pinhole-free also becomes a challenge. This is where atomic layer deposition can help.

For the best protection one needs to lay a tight protective layer as close to the components as possible.

With atomic layer deposition, it is possible to create a conformal and invisible coating on the components right on the circuit board. In the large chambers of Beneq batch ALD equipment, ALD anti-corrosion coatings can also be applied to large equipment parts. 

ALD films can also improve capacity, power density, cycle life, rate capability and cycling performance of lithium-ion battery packs. Very thin Al2O3 passivation layers improve also the capacity retention of lithium-ion batteries. For example a physical protecting barrier layer with an ultra-thin ALD layer deposited on the cathode has been tested to improve battery stability by suppressing side-reactions between the electrode and the electrolyte.

A conformal, dense and pinhole-free ALD coating with Al2O3 or similar in a one of Beneq’s many ALD systems enables environmental corrosion protection of all sensitive components and materials in high volumes.


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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