X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Thin film encapsulation of scintillator plates

 

The challenge

Common scintillator materials include Cesium Iodide (CsI) and Sodium Iodide (NaI), which are sensitive to moisture. Competitive product lifetime requires a thin film encapsulation coating.

The customer

A leading scintillator plate manufacturer.

Beneq solution

A robust batch ALD process for up to 440 x 440 mm plates. A conformal, dense and pinhole-free low temperature Al2O3 and TiO2 barrier coating enabled dramatic increase of product lifetime and reliability.

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Thin Film Encapsulation for Scintillator Plates

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
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  • Beneq ALD coatings for wafer-level moisture protection
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  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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