Spatial ALD equipment

Beneq WCS 600

Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production.

ALD system for industrial OLED encapsulation

Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production. The system is uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery, and coating of flexible glass.

  • Continuous deposition of high quality ALD film onto rolls of flexible substrates such as polymer, metal or paper
  • Low processing temperature (< 150 C) for sensitive substrates
  • Wide operating pressure range for easy line integration
  • System deposition speed is highly scalable, reaching 10 m/min speeds

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