Spatial ALD equipment
Beneq WCS 600
Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production.
Industrial scale R2R ALD system
Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production. The system is uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery, and coating of flexible glass.
- Continuous deposition of high quality ALD film onto rolls of flexible substrates such as polymer, metal or paper
- Low processing temperature (< 150 C) for sensitive substrates
- Wide operating pressure range for easy line integration
- System deposition speed is highly scalable, reaching 10 m/min speeds
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