Research Equipment

Beneq R2

Compact, scalable. Your perfect ALD research partner at EUR 130 000.

R2 landscape

Compact, scalable. Your perfect ALD research partner at EUR 130 0001. 

A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.

1. Standard thermal ALD setup (see below for details). Final price varies by customer configuration and add-ons.

Build your R2

  • 4 liquid sources. Uses standard 50 ml Swagelok containers.
  • Single-wafer reaction chamber
  • Spare part and consumables kit
  • Packing and shipping CIP to airport
  • Commissioning and start-up (incl. 3 days onsite)
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