The ultimate protection against water vapor and oxygen
ALD coatings offer the highest performance pinhole-free barrier against environmental degradation. ALD film is fully conformal and pin-hole free. With only 20 nm of aluminum oxide we can reduce water vapor transmission rate (WVTR) levels to 5×10-6 g/m2 per day.
Beneq: the trusted ALD partner for OLED encapsulation
We understand OLED encapsulation. Our solutions range from single wafer thermal and plasma-enhanced ALD (PEALD) to thermal 25 wafer batch for high volume manufacturing. Available both for 200mm and 300mm. Our ALD tools come with built-in software controls that are designed to easily integrate with OLED micro display manufacturing lines. We provide face-down and face-up configurations and always match your line height. Add a turbo-pump option for high-vacuum integration.
Validated by leading micro OLED researchers in the field
Measuring the WVTR of a high quality ALD barrier film can be very challenging. When ALD TFE is applied directly on the OLED device, what really matters is the OLED lifetime. This is often easier to measure than the WVTR, but in order to quantify the barrier performance different types of WVTR tests are used. One of the most sensitive test methods is a Calcium test. An example of our ALD stack in a Ca-test is shown below.
Ca-test performed on a 100nm Al2O3/TiO2 nanolaminate at 23 C and 50% relative humidity resulted in a WVTR of 3×10-6 g/m2 day. Deposited with Beneq TFS 200 at Fraunhofer IAP. (Courtesy of Dr. Christine Boeffel, Fraunhofer IAP).
Your one-stop encapsulation solution
We offer multiple ALD tools that are production ready for OLED encapsulation. This significantly reduces your time to manufacturing and offers seamless integration with your production lines. Choose from our large selection of chamber options as well as configurations, whether it is for R&D, pilot scale or high volume manufacturing.
ALD offers the only way to create conformal ultra-thin protective coatings on surfaces with high aspect ratios and complex 3D shapes. ALD is also a great solution for encapsulating sensitive surfaces. Here are 3 of Beneq’s ALD moisture barrier customer cases from the electronics industry.
According to recent industry news, smartphone market leaders, such as Apple, Samsung and LG, are planning to adopt ALD-based thin film encapsulation solutions for flexible AMOLED displays. Details of the plans have not been confirmed, but this is nevertheless exiting news for the whole ALD community.
Electronic components and devices do not tolerate hot and humid conditions. Most people know this and avoid exposing electronics to vapors and liquids.
Our complete thin film service concept, Thin as a Service, which we launched last year, has been received well. The customers seem to appreciate the possibility to get a quick proof of concept of new ALD applications with ALD-123 as well as the shorter time to production enabled by our Coating Services.
A typical WVTR value of our nCLEAR ALD barrier coatings is 4×10-6 g/m2 per day. That is a million times less moisture through the surface than with the best parylene alternative.
Beneq, a global supplier of thin film coating equipment, announces the availability of an R&D thin film encapsulation system for 200×200 mm OLED substrates.
