MEMS, SENSORS, & ACTUATORS

Combining flexibility, conformality and nanoscale precision for MEMS fabrication

In MEMS, the interest for ALD is driven by the unique combination of conformal films deposited at a wide temperature range allowing for a variety of applications. ALD ensures identical film coverage on all sides of the device even at high aspect ratios. The ALD film thickness can be precisely controlled at the atomic level as each reaction cycle deposits approximately one atomic monolayer.

Micro-electromechanical systems, or MEMS, constitute a myriad of devices which combine electrical and mechanical components, range in size from a few microns to millimeters, and are often fabricated using traditional semiconductor manufacturing processes. ALD builds material up Angstroms at a time with high conformality even on complex geometries. For MEMS and sensors fabrication, including inkjet heads, pressure sensors, and microfluidics, ALD offers the most precision deposition technique on the market. Beneq ALD solutions include a wide range of materials and processes, making it simple to coat tiny, complicated components with anti-stiction, piezoelectric, or barrier films.

ALD SOLUTIONS FOR MEMS, SENSORS, & ACTUATORS

Process Options
Thermal ALD
Plasma-Enhanced ALD

Materials
Al₂O₃, AlN, SiO₂, Si₃N₄, TiO₂, HfO₂, Ta₂O₅

Substrates
Si, Ge, GaAs
Up to 8″ wafers

Inkjets

Inkjet nozzle devices comprise a resistive heater element coated with several thick protective layers which interfere with rapid cooling. These protective layers are necessary to protect the heater element from the harsh environment inside inkjet nozzle chambers. In piezoelectric inkjet technology the channels or oscillating material need to be protected against the corrosive effects of all types of inks.

Microfluidics

For fluid conducting behavior of microcapillary systems containing various 3D microstructures and surface modifying molecular layers. The inner surfaces of the capillary systems are covered by Atomic Layer Deposition (ALD) of different oxide layers to control their wetting properties.

Inertial and Pressure

Sensors, including accelerometers, gyroscopes, pressure sensors, and microphones, have become a multi-billion-dollar market in consumer electronics, automobile, and industrial applications. ALD solutions include anti-stiction hydrophobic films and conformal sealing layers .