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Cleanroom

Atomic layer deposition and other thin film coatings are very sensitive to particle contamination and require special high purity production processes.

Our cleanroom area of 1900 m2 is one of the largest in Europe. It contains 40 ALD reactors, five metal sputters, three high precision lithography lines and a wide range of testing and measurement equipment. Together with advanced air-conditioning and vacuum pump systems, chemical supply management and a water purifying station, it forms the heart of our factory.

The cleanroom is divided into several sections according to the air purity requirements (ISO 5 to ISO 7) and its performance is constantly monitored. The standard operating procedures and the ESD (electrostatic discharge) control program are ISO 9001 certified.

Lumineq display production

The world’s first ALD-based commercial products were electroluminescent displays, which are now sold under our Lumineq display brand. Millions of ALD-based displays have been shipped from this factory since the 1980’s.

The Lumineq manufacturing process flow consists of several patterning steps and five distinct ALD coating phases (one ion barrier, two dielectric layers, an index matching layer, which also acts as a moisture barrier, and the actual electroluminescent phosphor layer) that are deposited with Beneq reactors.

This 48-meter long fully automated lithography production line is used for making transparent ITO (Indium Tin Oxide) conductors. The line consists of substrate cleaning and drying, UV-treatment, photoresist coating and baking, exposure, developing, wet etching and residual photoresist stripping.

The photoresist used in the process is highly UV-sensitive. Short wavelengths need to be filtered out from ambient lighting, which results in the characteristic yellow appearance of the process area.

Reliability center

Lumineq displays are known for their reliability. They tolerate cold, pressure, shock and vibrations better than any other display type, and offer long product life and long-term availability for a wide range of demanding applications.

Before any products are shipped to customers, each display goes through extensive reliability testing.

The testing starts with First-Turn-On testing (FTO), which is performed on every uncut display glass in a product specific tester. During FTO, electricity is applied to the thin film stack for the first time and the electrical functionality and visual performance are evaluated by an operator.

After the FTO test, the displays are loaded into an aging chamber. During the aging process, all the fields of the displays are lit with over-voltage and elevated driving frequency. The aging process also guarantees the brightness uniformity and stability of the displays.

Spatial ALD laboratory

Spatial ALD technology is used for new industrial coating applications, which require high capacity and coating of large areas. Potential applications of the technology range from glass coating and photovoltaic applications to various lighting and display solutions.

Unlike batch-based ALD equipment, the precursor gasses in spatial ALD systems are separated in space. With careful management of gas flow and relative movement between the substrate and the gasses, it is possible to deposit the coating continuously on moving substrates at high speeds.

This large-scale pilot system is utilized for R&D test programs, pilot customer projects, application-driven development services and testing of new business opportunities. The system can be operated in near atmospheric pressure, simplifying the integration with other processing equipment in industrial use.

Aerosol coating laboratory

Beneq nFOG aerosol thin film coating is a unique method for wet film deposition. The nFOG technology uses small aerosol droplets to carry precursors to the surface of the substrate. It offers a rare combination of high coating quality with industrial scalability in atmospheric pressure and room temperature, without the limitations of conventional coating methods, such as spray or spin coating.

The R&D and process development for our aerosol customers and the assembly of all aerosol thin film coating equipment takes place in this space. The special hand-made atomizers that create the aerosol are also manufactured here.

The smaller Beneq ACS 200 batch reactor serves new customers for process compatibility verification and small scale coating services. The larger Beneq nFOG pilot line can be used to demonstrate scalability and compatibility with industrial mass-production. The maximum substrate width of 1000 mm and conveyor speed of 10 m/min satisfy typical industrial productivity requirements.