Latest Thin film news

13 November 2017 Blog post

In Semicon Europa, the largest microelectronics event in Europe, 14-17, November, Munich, Germany, Beneq will launch Beneq C-Series, a new Cluster-Compatible ALD product family for high-volume manufacturing of wafers. This is the start of a throughput revolution for ALD in new More than Moore wafer processing markets.

11 July 2017 Blog post

One of the main ALD events of the year, ALD 2017, the 17th International Conference on Atomic Layer Deposition, is about start in Denver, Colorado. Beneq is again a platinum sponsor and we will have lots of activity at the event.

28 March 2017 Blog post

Beneq ALD coatings bring competitive advantage in many areas. New thin film customer cases about the benefits of ALD and the advantages it brings for our customers’ end products are now available on the Beneq website.

8 March 2017 Blog post Thin Film Solutions will be at the SEMICON exhibition on March 14-16 at the Shanghai New International Expo Center introducing our latest products for industrial customers who require low cost in high volume manufacturing.

If you are around, come and meet us at our stand (Hall W11, booth #1135).

8 November 2016 Blog post

Ever since we earlier this year announced the licensing of rotary spatial ALD technology and launched Beneq R11, our new rotary tool for plasma enhanced spatial ALD, we have received a steady flow of inquiries and questions about where we see the new equipment being the most useful.

1 November 2016 Blog post

Beneq as a company is all about resource savings, durability and more efficient use of energy. We are experts on smart use of materials that make our customers’ products function better.

ALD improves the efficiency of energy production and reduces energy consumption in the world. ALD allows wiser use of precious raw materials, protects products and makes them last longer. ALD also makes electronics and optics more efficient and resilient. That saves energy too.

14 October 2016 Blog post

High film quality and coating conformality are key drivers for the adoption of ALD processes in the energy, lighting and display industries. Large-area industrial ALD has many interesting new application areas: thin film encapsulation, anti-reflection coatings, surface passivation, buffer layers, flexible moisture barrier films, powder functionalization…

28 September 2016 Blog post

According to recent industry news, smartphone market leaders, such as Apple, Samsung and LG, are planning to adopt ALD-based thin film encapsulation solutions for flexible AMOLED displays. Details of the plans have not been confirmed, but this is nevertheless exiting news for the whole ALD community. It shows the potential of atomic layer deposition in addressing consumer product challenges and means a huge leap forward in the addressable market size of ALD.

8 September 2016 Blog post

A very interesting doctoral dissertation in the field of semiconductor technology will be defended tomorrow in the Department of Micro- and Nanosciences of Aalto university School of Electrical Engineering.

30 June 2016 Blog post

The ALD event of the year is approaching. As you know, Beneq is a platinum sponsor of ALD 2016 (the 16th International Conference on Atomic Layer Deposition), which will be held at the Convention Centre Dublin, Ireland, 24-27, July 2016.

3 June 2016 Blog post

During the past months, there has been talk about our new exciting spatial ALD equipment, which will once again make ALD bigger, faster and more flexible. It is now time to go a little bit deeper in the details of the results of our test runs with the equipment. We have now verified the process quality, conformity of coatings and the coating speed. It looks promising!


20 April 2016 Blog post

We have a lot of visitors at the Beneq factory again this week. Today started a very interesting conference where members and partners of the EU-funded PLIANT project for Process Line Implementation for Applied Surface Nanotechnologies gather at Beneq to share the latest advances in the project.

8 March 2016 Blog post

Earlier in this blog, we have told many stories about our displays and thin film coating solutions in extreme conditions. Lumineq displays have been flying high in aircrafts, entered the Amazon rainforest in helicopters and running on fuel cells in Alaska.

1 February 2016 Blog post

One of the main events in the world of atomic layer deposition this year is the 16th International Conference on Atomic Layer Deposition, which will be held July 24-27 in Dublin, Ireland.

Beneq will participate in ALD 2016 as a platinum sponsor. We are pleased to invite you to visit us in Dublin.

18 December 2015 Blog post

Saving the world’s resources by miniaturizing and digitalizing everything with new solutions and innovative technologies is at the core of our thinking at Beneq.

Atomic layer deposition is about making the world thinner. It saves material. We also make electronics, optics and for example solar cells more efficient and durable. That saves energy.

Our displays are the most durable in the business. The long life cycles reduce the need for replacement parts. It saves resources too.

14 December 2015 News

DI Jukka Nieminen (46) on nimitetty Beneq Oy:n toimitusjohtajaksi 1.1.2016 alkaen. Beneqin toimitusjohtajana yhtiön perustamisesta 2005 lähtien toiminut DI Sampo Ahonen (46) jatkaa hallituksen puheenjohtajana.

Beneq Oy:n hallitus on myös päättänyt suunnitelmasta fuusioida tytäryhtiö Beneq Products Oy emoyhtiöön vuoden 2016 alusta. Yhdistyneen yhtiön liikevaihto on noin 21 MEUR, ja henkilökuntaa on 125 Suomessa, USA:ssa, Saksassa, Venäjällä ja Kiinassa.

22 October 2015 News


为了让更多人知道TFEL显示屏坚固、超宽温、可适用于恶劣环境的独特性能及TASEL独一无二的透明性,Beneq与America II Electronics签署了合作代理协议。America II将代理Lumineq线下的所有显示产品,并提供团队和技术支持,尽全力提供客制化服务。

“由于Lumineq显示屏业务的不断增长,我们需要加强我们的渠道和代理商网络,这样才能更好地为老客户和潜在的新客户提供技术和售后服务。我荣幸地欢迎America II Electronics加入Lumineq全球代理商团队。相信我们两家强强联手,能将这独特的视觉体验融入更多样化的产品和应用领域。”Beneq销售和市场副总监Jukka Nieminen先生这样说到。

22 October 2015 News

As Beneq continues to expand its business of Lumineq® displays for extreme conditions, there is a growing need for wider distribution of the company’s rugged thin film electroluminescence (TFEL) displays as well as the fully transparent TASEL® displays, which have a substantial installed base and range of interesting future applications in the defense, transportation outdoor instrumentation and medical electronics markets.

24 November 2014 News

nFOG™ 和 KhepriCoat®技术的结合带来高品质的太阳能玻璃防反射涂层

Beneq是业界领先的ALD和气溶胶镀膜工业化和研发设备的供应商,Royal DSM是全球生命科学和材料科学公司。 二者正在合作开发并且进行商业运作一个全新且卓越的气溶胶镀膜技术用于太阳能玻璃AR涂层应用设备。
在这项独家的合作中,在DSM公司提供 其独特的Khepricoat®AR涂层技术的同时,Beneq将推出其最近发布的nFOG™气雾涂层技术。这两种技术的结合提供了一个能够适应太阳能玻璃的严格要求的AR涂层的解决方案。

“太阳能市场行业对质量的需求正在不断增加,” DSM高级涂层公司副总裁Oscar Goddijn说。

“我们与Beneq的合作非常愉快,且已经在太阳能工业创新沉积技术领域中建立起无可争议的领导者地位 。这种开放创新对于DSM同样至关重要。两个公司共同携手,我们就可以利用和扩展我们的独特的专业领域为太阳能市场提供新一代的基于AR涂层的技术以满足其需要。”

22 October 2014 News

Combination of nFOG™ and KhepriCoat® technologies to deliver superior quality of anti-reflective (AR) coating on solar cover glass

Beneq, the global supplier of production and research equipment for thin-film ALD and aerosol coatings, and Royal DSM, the global Life Sciences and Materials Sciences company, are working together developing and commercializing a completely new and superior aerosol deposition technology for AR coatings for solar glass applications.

10 October 2014 News

Beneq 薄膜设备公司已与美国俄亥俄州辛辛那提市的Maxima科技公司签署协议,提供维修和售后服务,更加贴近北美客户。这项合作将加速服务响应时间及为Beneq(ALD)客户提供本土支持。




“我们非常高兴能与Beneq公司进行密切的合作并可以采用公司尖端的ALD技术。双方在ALD领域都有长足的经验。协议签署后,我们强强联手,希望可以在这个领域成为世界级的领导者。”Maxima科技公司 的总裁 Jacob Bertrand博士说。

1 October 2014 News

Beneq Thin Film Equipment has entered an agreement with Maxima Sciences of Cincinnati, Ohio, to offer maintenance and service closer to its customers located throughout North America. This collaboration will enable faster response times and local support for Beneq’s atomic layer deposition (ALD) customers.

3 September 2014 News

Beneq 很高兴宣布推出名为 nFOG™ 的新型常压湿法镀膜技术,主要应用于涂敷镀膜加工,如大尺寸玻璃减反射镀膜。该新技术结合了喷涂镀膜的速度优势,浸沾式镀膜的高品质以及滚筒式镀膜的原材料高效利用的特性。目前 Beneq 的 nFOG™ 正在一家试验工厂中使用。

Beneq 最新的 nFOG 常压湿法镀膜技术采用独特的非接触沉积的方法对大部分敏感的具有不同厚度、不同形状和不同尺寸的基板进行镀膜。典型的膜层均匀性优于 ±3% ;基底宽度可以达到数米。

基于气凝胶技术的镀膜工艺可以在广泛的液态料源,包括水溶性、乙醇溶液或者胶体范围内工作。典型的干燥的涂层厚度范围在 10 - 500 纳米。

由于沉积系统没有可移动部分,工艺过程可靠并且可重复。工艺过程中大多数的材料可以回收再利用,因此可实现特有的高材料利用率,原材料利用率可以高达 95% 。另外,模块化的处理方式使扩大生产规模变得简单而高效。

Beneq 首席执行官 Sampo Ahonen 谈到“我们的 nFOG 技术可用于大多数的溶胶-凝胶或基于液态材料的镀膜工艺,从实验室规模到工业生产规模,都可保证与旋涂和浸镀类似工艺质量。”

3 September 2014 News

Beneq is pleased to announce the launch of its new atmospheric wet coating technology called nFOG™ for use in applications such as anti-reflective coatings for large-sized glass. This new technology combines the advantages of the speed of spray coating, the quality of dip coating and the high material yield of roller coating. Beneq’s nFOG is currently in use as a pilot plant.

12 June 2014 News

As of Thursday, June 12, 2014, Beneq’s facilities in Vantaa will join Lumineq Displays on its premises in Espoo, Finland.

Now for the first time, Beneq Thin Film Equipment and Beneq Lumineq Displays will be under the same roof, enabling the two complementary entities to take greater advantage from their synergies.
The Espoo plant, the biggest concentration of ALD equipment in the world, will be the place that combines the past, present and future of ALD.

15 April 2014 News



MBRAUN有超过30年的经验在净化间和超净化间环境中提供惰性气体手套箱的解决方案方面 。其操作的可靠性以及环境的纯净度迅速为MBRAUN在提供最好的手套箱方面赢得了世界声誉。多年来,MBRAUN已将其业务从欧洲扩展到美国和亚洲。


15 April 2014 News

On April 15, 2014, Beneq announced that it is joining forces with MBRAUN to address the growing OLED market needs by offering turn-key R&D solutions. The goal is to enforce rapid adaptation of Beneq’s breakthrough thin-film encapsulation technology in OLED research and manufacturing.

6 February 2014 News

The Mint of Finland has chosen Beneq’s patented nSILVER® invisible protective coating to prevent tarnishing of its special numbered series of EUR 20 coins to honor Tove Jansson, the Finnish creator of the Moomin books for children. The unique and extremely thin nSILVER protective coating is based on Beneq’s atomic layer deposition (ALD) technology. It prevents silver from tarnishing by protecting it from airborne sulfur and other chemicals or liquids, which react with the surface.

19 December 2013 News

On Wednesday, December 11, Beneq received a special commercialization breakthrough award from Tekes, the Finnish funding agency for technology and innovation, as part of its six-year-long Functional Materials program. The goal of the program was to promote the development of application-focused materials and processes, as well as to raise foreign investor awareness of Finland’s exceptionally high level of material expertise.

18 November 2013 News

On November 15, Beneq and Saint Petersburg Electrotechnical University (LETI) officially opened the ALD Application Laboratory (ALD AppLab) in St. Petersburg, Russia. The laboratory, a concrete step in boosting thin film research in Russia, is the next step for Beneq in building a notable and ever-growing business around ALD* in Russia. Also, by creating a cradle for ALD-based research and development, Beneq and LETI together acknowledge the considerable pool of thin film and especially ALD know-how that exists but still lies untapped in Russia today.

4 September 2013 News

On September 4, Mordovia State University will officially open a laboratory to research and study thin-film technologies (100 nm and less) using atomic layer deposition (ALD) with Beneq’s TFS 200 equipment. The laboratory opening is a natural next step in implementing the strategy to establish national nanotechnology in Russia. This has been made possible thanks to the rapid technology development in synthesizing nanostructured materials using the ALD process.

2 July 2013 News

The Centre for Process Innovation (CPI), has selected Beneq’s roll-to-roll ALD unit for their thin-film barrier development platform. Beneq is a leading ALD equipment supplier that has been developing roll-to-roll ALD based on spatial atomic layer deposition (ALD) since 2008. The equipment will be delivered to CPI in England in Q2 of 2014.

Beneq has signed an agreement with CPI to deliver roll-to-roll (R2R) ALD equipment to CPI’s NETPark facilities in Sedgefield in North East England. Beneq was chosen as the result of a public tendering procedure.

18 June 2013 News

To make it easier for customers to enter the thin film market, Beneq now offers a unique collection of coating services at its facilities in Espoo, Finland. This lowers the risk of new product development and provides a safe path for scaling up to industrial production. Beneq’s capabilities in thin film coating services cover many upcoming commercial technologies.

29 May 2013 News

Yuri Kochanov has been appointed Country Manager of OOO Beneq as of May 20, 2013. Together with his team in Russia, the recently opened Beneq subsidiary in Saint Petersburg is ready to serve customers with a complete palette of thin film equipment, thin film coating services and Lumineq thin film electroluminescent displays.

7 May 2013 News

China Sunergy, a leading Chinese solar cell manufacturer, has selected Beneq ALD technology for surface passivation to improve the energy efficiency of its products. Beneq is a leading ALD manufacturing equipment supplier that has been developing crystalline silicon (c-Si) surface passivation with the batch atomic layer deposition (ALD) process since 2009. The first production-scale equipment will be delivered to China Sunergy in June 2013.

10 April 2013 News

Beneq, a global supplier of thin film coating equipment, announces the availability of an R&D thin film encapsulation system for 200×200 mm OLED substrates. The first system will be delivered in the summer of 2013 as part of an atomic layer deposition (ALD) project to the German-based Fraunhofer COMEDD.

12 March 2013 News

On March 12, Beneq will open a subsidiary and operations in Saint Petersburg to commercialize its atomic layer deposition technology (ALD) in the Russian market. As part of the overall strategy, the company will sign an agreement to launch a joint laboratory for research and development of industrial applications in ALD with Saint Petersburg State Electrotechnical University (SpbGETU).

12 March 2013 News

On March 12, Beneq will open a subsidiary and operations in Saint Petersburg to commercialize its atomic layer deposition technology (ALD) in the Russian market. As part of the overall strategy, the company will sign an agreement to launch a joint laboratory for research and development of industrial applications in ALD with Saint Petersburg State Electrotechnical University (SpbGETU).

1 February 2013 News

Beneq announces a breakthrough in its roll-to-roll (R2R) atomic layer deposition (ALD) technology with the delivery of its first industrial-scale system to the Advanced Surface Technology Research Laboratory (ASTRaL), a research unit based in Mikkeli, Finland, that belongs to the Lappeenranta University of Technology. The R2R system allows the development of rapidly growing new applications that were not able to take advantage of ALD coating until now. 

31 October 2012 News

Beneq, world-leading provider of thin film coating equipment for research and industry, has today announced its plans to establish operations in Russia and the CIS.

2 August 2011 News

由倍耐克公司和格拉司通公司联合提供的用于光伏 (PV)行业的TCO玻璃镀膜的第一条TFC2000™生产线已销售给一家亚洲客户。该生产线销售额约为1400万欧元,其中格拉司通公司设备份额超过400万欧元。该生产线计划在2012年第一季度交付。

芬兰倍耐克公司的CEO,Sampo Ahonen 先生表示:“的确,这虽是我们期望的订单, 同时也最终体现了市场对高质量TCO玻璃需求的增长和对生产该产品的镀膜设备需求的增长。这充分验证了倍耐克和格拉司通公司之间的紧密合作,通过这样的合作带动了我们的飞跃发

在2010年9月,格拉司通公司和倍耐克公司公布了他们在太阳能玻璃镀膜设备方面的战略合作计划。双方合作的结果带来了全新的连续生产的离线TFC2000™镀膜方案,该方案提供了一个可以接受的工业化生产高质量的可满足太阳能电池行业应用的TCO镀膜玻璃的途径。倍耐克公司的具有独特性能的和具有知识产权的nAERO®镀膜系统与格拉司通公司的CHF Pro™玻璃热处理生产线完整地集成在一起。TFC2000™生产线结合了世界一流的玻璃退火技术和先进的可满足快速增长的太阳能应用需求的镀膜技术。

22 March 2011 News

The first Beneq-Glaston TFC2000™ line for manufacturing TCO coatings on glass for photovoltaics (PV) has been sold to Asia. The total order is approximately EUR 14 million, of which Glaston’s share is over EUR 4 million. The line delivery is scheduled for Q1 of 2012.

Beneq CEO, Mr Sampo Ahonen, comments: “This is a definitive demonstration of the growing need for high-quality TCO-glass and coating equipment to manufacture it. It is also good proof of the seamless cooperation between Beneq and Glaston, which with this transaction has taken a giant leap forward.”

Contact Beneq

Contact Beneq

Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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