Beneq provides a range of ALD solutions for high volume manufacturing of wafer coatings in the semiconductor and MEMS industry.

微机电系统与晶圆加工

倍耐克为晶圆工业加工和高容量晶圆设备自动化批量生产提供全方位的服务。
考虑到所有特殊的半导体要求,包括SEMI S2安全性和低粒度计数,倍耐克的晶圆薄膜解决方案提供了高容量批量处理和标准盒式磁带自动化的独特组合。
倍耐克还提供了多种空间原子层沉积解决方案,适用于半导体和微机电系统行业的晶圆镀膜的大批量生产。
其应用领域涵盖电介质和导电层、阻隔层和钝化层。

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Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products