Pioneering Atomic Layer Deposition
Beneq is the global leader in industrial atomic layer deposition (ALD) equipment and research since 1984.
About us
Discover our Products
In 1984 we started the world’s first industrial production using atomic layer deposition (ALD). Today, Beneq is the most recognized provider of ALD equipment and R&D services. Our mission is to create premium tools for production and for research, and to enable technology mega trends through industrial ALD solutions.
Semiconductors equipment
The Beneq Transform® series offers unparalleled flexibility for processing sequences with multiple ALD process modules to meet wafer capacity. It is designed to be upgradable to meet growing volumes and new ALD processes.
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Batch Production
Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films. Easily scale up ALD deposition from the R&D phase to full manufacturing.
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Research
Beneq is the most installed ALD equipment provider for academic research and corporate R&D. Our products have been designed to minimize cross contamination in a multi-user research environment.
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Spatial ALD
Roll-to-roll or rotary ALD systems for flexible substrates in R&D and production. Custom-build based on your specific requirements.
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Markets
If you’re looking for ALD, you’ve come to the right place. Beneq offers numerous coating solutions tailored to give you the most out of your products and manufacturing processes.
Markets
Atomic Layer Deposition
What if you could manipulate matter at the nano scale? What if you could build things up a layer of atoms at a time? Wonder no more. Welcome to Atomic Layer Deposition.
Technology
