Beneq WCS 600

Thin Film System for Industrial OLED Encapsulation

Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production. The system is uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery, and coating of flexible glass.

  • Continuous deposition of high quality ALD film onto rolls of flexible substrates such as polymer, metal or paper
  • Low processing temperature (< 150 C) for sensitive substrates
  • Wide operating pressure range for easy line integration
  • System deposition speed is highly scalable, reaching 10 m/min speeds

Technical Specifications

 Process temperature range  up to 150 ºC
 Substrate size (web width)  up to 625 mm
 Substrate material  Flexible material such as polymer,


 metal, glass or paper

 Web speed  up to 10 m/min
 Throughput (for 20 nm film thickness)  400,000 m2 /year
 Control system  PLC control with PC user
 Main dimensions, ALD system (L × W × H)  2060 × 2340 × 2150 (mm)
 Main dimensions, Precursor Delivery System 
 (L × W × H)
 1750 × 800 × 1530 (mm)
 Main dimensions, electrical cabinet
 (L × W × H)
 1010 × 320 × 1220 (mm)

Contact Beneq

Contact Beneq