Beneq P400A and P800
Thin Film Systems for industrial production
The Beneq P400A and P800 are ALD systems designed for industrial-scale production. They are ideal tools for scaling-up thin film deposition from R&D phase to full-size industrial production. The systems are dependable, industrially proven and mature in terms of technical distinction. The design is based on 25 years of continuous (24/7) operation in demanding industrial applications.
Most of our industrial customers require dedicated equipment and process setups. Beneq has several in-house P400A and P800 systems to cater for a wide range of coating needs in application development and thin film R&D. This way, customers looking for production equipment can verify the technical and financial performance of the process and equipment, before making an investment. In addition, we offer the possibility of low-volume production until our customer’s own fabrication has been set up.
Scaled to large batches and thick film stacks
Opposite to general belief, many ALD processes use thick film stacks (> 1 μm). Thick batch processes necessitate optimized handling of precursor source materials and advanced process waste management. The P400A and P800 come equipped with a multiphase filtering system, which is capable of handling large amounts of precursors. During process runs, precursor de-activation functions guarantee that the system allows no chemicals that could cause film growth, to pass through to the vacuum pump. The vacuum filter is of large-volume type with high gas conductance. The large waste handling capacity of the system enables typical cleaning intervals of approximately 1 year in R&D mode and 3 to 6 months in production. For process and coating run design, the user-friendly recipe editor for nanolaminates, mixed films and complex coating design structures is capable of handling hundreds of different layers in the same run.
- Immediate scale up to production after R&D phase.
- Extensive logging for repeatable production control.
- UPS supported functions.
- Low need for maintenance.
- Unique mini-environment design for flexibility in loading, batch and substrate size as well as contamination control.
- Mini-environment and proprietary filtering design separate cleaning work from the P400A system base. No downtime due to cleaning.
- Cost-efficient hot-wall and high-capacity batch system.
- Unique thermally stable source block with patented rapid embedded dosing valves and integrated flow channels.
- Vacuum pumping system with multiphase, proprietary high-capacity precursor de-activation and filtration system to enable high-volume batch processing.
- Over-heating prevented by additional PLC with dedicated thermocouples, apart from normal heating loop, for increased production safety.
- Industry-proven high repeatability and reliability in production, based on 30 years of development.
|Process temperature range||25 - 550 °C||25 - 550 °C|
|Vacuum chamber dimensions||ø400 × 1000 (mm)||ø800 × 1600 (mm)|
|Reaction chamber types and dimensions||Customized case- and substrate-specific, e.g.:
- chamber inner dimensions 250 × 250 × 1000 (mm)
- chamber for max. planar substrate 370 × 470 (mm)
|Customized case- and substrate-specific (within the boundaries of the vacuum chamber).|
|Precursor sources||5 parallel feeding lines for gas, liquid and solid precursors. More than 10 precursors possible.||5 parallel feeding lines for gas, liquid and solid precursors. More than 10 precursors possible.|
|Control system||PLC control with PC user interface||PLC control with PC user interface|
|Main dimensions (L × W × H)||2400 × 930 × 2420 (mm)||3200 × 1340 × 2460 (mm)|
Encapsulation of OLED microdisplaysBeneq developed a thin-film encapsulation nanolaminate coating for a leading Asian OLED microdisplay manufacturer to enable long lifetime for their microdisplays.
Insulator for thin film electroluminescent displaysAn ALD nanolaminate film was developed for Lumineq displays to create a fully pin-hole free thin film insulator layer.
Top electrode for transparent displayBeneq developed an ALD Transparent Conductive Oxide (TCO) for Lumineq's electroluminescent displays to replace the sputtered IDO that was used in the transparent top electrode.
Moisture protection of PCBsBeneq developed a low-temperature ALD moisture barrier solution for a leading supplier of electronics for personal safety monitoring to protect the sensitive circuit board components from moisture.
Encapsulation of phosphor powderBeneq provided a moisture barrier solution using ALD for FBR (fluidized-bed reactor) for a leading phosphor material manufacturer to protect the sensitive phosphor powders used in LED lighting from moisture.
Anti-corrosion coating for LED packagingBeneq's ALD coating solution solved a leading LED manufacturer's silver reflector corrosion problem by both applying ALD to coat the semi-finished wire-bonded LED assemblies, and by protecting the silver surface with nSilver.
Anti-reflection coating for solar glassBeneq and DSM created a production scale solution using DSM AR coating material and Beneq nFOG aerosol technology for a leading solar glass manufacturer to reduce light reflection on solar panels.
Metal-like coatings for watch partsBeneq developed a thin ALD-based optical coating for a leading watch parts manufacturer to both provide a specific color and to protect from corrosion.
Wafer-level moisture barrier for LEDBeneq provided moisture coating using TFS 200 for a leading LED manufacturer to protect LED dies from moisture and prevent oxidation.
Bottom DBR for LEDBeneq developed a multi-layer DBR structure on a patterned surface for a leading LED manufacturer.
Filling of diffractive gratingsBeneq used ALD coating to fill diffractive gratings for a leading optical system manufacturer to keep the gratings free from debris and boost their optical performance.
Anti-corrosion coating for sensorsThe highly conformal and pin-hole free ALD coating solved a leading sensor manufacturer's sensor corrosion problems without compromising sensor sensitivity.
Buffer layer for CIGS solar panelBeneq developed a thin, cadmium-free ALD buffer for the solar panels of a leading CGIS solar panel manufacturer.
Diffusion barrier for Li-ion batteriesBeneq's ultra-thin ALD coating solved a leading Li-ion battery manufacturer's battery corrosion challenges by reducing the fading of battery capacity caused by repeated charge and unload cycles.
Anti-tarnishing coating for jewelryBeneq helped Kalevala Jewelry in preventing the discoloration of silver surfaces by providing the patented nSilver industrial-scale protection solution for an ultra-thin, totally conformal, and fully transparent anti-tarnish coating.
Optical NIR filter on a glass cylinderBeneq developed a customized batch ALD process for a CCD sensor -based industrial vision systems supplier to coat their near-infrared (NIR) filters.
Optical coatings for lenses in high power lasersBenq developed a conformal high- and low-index multilayer optical coating for a leading provider of high power laser optics and coatings using the TFS 500 batch ALD system.
Coating of Microchannel Plates (MCP)Beneq developed an ALD coating solution for microchannel plates (MCP) for Incom, Inc., the world’s largest supplier of rigid fused fiber optics, to allow for significantly greater secondary electron emission .
Thin-film encapsulation of OLED lightingBeneq developed a conformal, dense, and pinhole-free Al2O3 and TiO2 barrier coating for a leading OLED lighting panel manufacturer to protect OLED panels from humidity.
Thin-film encapsulation of scintillator plates for X-ray imagingBeneq developed a conformal, dense, and pinhole-free low temperature Al2O3 and TiO2 barrier coating for a leading scintillator plate manufacturer to protect scintillator materials from moisture and increase product lifetime and reliability.