MEMS and Wafer Processing
Beneq offers a whole range of services for industrial processing of wafers and automated batch wafer equipment for high volume manufacturing.
Beneq thin film solutions for wafers offer a unique combination of high capacity batch processing and standard cassette-to-cassette automation, taking into account all the special semiconductor requirements, including SEMI S2 safety and low particle counts.
Beneq also provides many spatial ALD solutions that are suitable for high volume manufacturing of wafer coatings in the semiconductor and MEMS industry. The application areas cover dielectric, and conductive layers, barriers and passivation.