Beneq ALD reactors are the most flexible on the market with a multitude of options

Options and Upgrades

All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the equipment optimal setup.

The large number of available options and upgrades for Beneq products means that your ALD research and thin film development will grow with you to meet all future requirements. The right configuration will also help you to decrease your valuable production downtime as well as maintenance and repair costs.

The available options and upgrades support the versatility and modularity of the Beneq TFS 200 equipment and improve the efficiency of the ALD process. You can get more information about the most polular options of Beneq TFS 200 from our product pages.

The easiest way to get an offer for Beneq TFS 200 options is to fill in the Beneq TFS 200 option quote form.

For the extra options and upgrade possibilities for other Beneq product, please contact our Customer Services team at service@beneq.com.

Contact Beneq

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Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products