Coating Service Equipment
Beneq Coating Services offers a wide range of chemistry-, process- and application-specific opportunities for customers to try out. In ALD development work, however, a lot of the feasibility of an application is fundamentally dependent on what equipment the coating is accomplished with. All ALD equipment on the market cannot fulfil the stringent requirements we apply to our standard coating activities, and therefore it is a great benefit for us and our customers to be able to offer coatings made in Beneq systems alone.
Our machine park boasts a set of eight complete ALD systems, range from our widely acclaimed ALD research platform, the TFS 200, to the industrial workhorses P400A and P800. Plasma-enhanced ALD (PEALD) is available, as well as a great number of substrate setups for research, pilot production and small-scale industrial batch processing.
For Coating Service customers, however, a major factor when considering coating trials is the capability to coat different types, shapes and sizes of substrates. Beneq can offer a solution for virtually any coatable substrate, from nano-sized particles to large-area glass panes, based on years of experience and an impressive collection of different substrate trays, rigs and holders. Please contact our experts by sending an e-mail to info(at)beneq.com.